Subheading
8414.10
8414.10 HS Code
vacuum pumps
vacuum pumps
Vacuum pumps; used in the manufacture of semiconductors or solely or primarily flat panel displays
8414.10.25Rotary piston pumps, sliding vane rotary pumps, molecular pumps and ruts type pumps; EXCEPT 8414.10.15
8414.10.81Diffusion pumps, cryostatic pumps and suction pumps
8414.10.89Other vacuum pumps
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